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Framework for Integration of Virtual Metrology and Predictive Maintenance

Georg Roeder, Andreas Mattes, Markus Pfeffer, Martin Schellenberger, Lothar Pfitzner, Alexander Knapp, Heribert Mühlberger, Andreas Kyek, Benjamin Lenz, Markus Frisch, Josef Bichlmeier, Günter Leditzky, Erich Lind, Silvia Zoia, Giuseppe Fazio

In: Proc. 23rd Ann. SEMI Advanced Semiconductor Manufacturing Conf. (ASMC'12). S. 288-293. DOI: http://dx.doi.org/10.1109/ASMC.2012.6212913


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